Zelenograd Nanotechnology Center reveals commercial pricing for its 350nm lithography system as Russia pursues semiconductor self-sufficiency
Russia’s Zelenograd Nanotechnology Center (ZNTC) has set the price for its first domestically produced lithography machine, the Progress STP-350, at approximately 392 million rubles (roughly $4 million) excluding VAT. When factoring in extended warranty coverage and additional service packages, the total cost exceeds 561 million rubles (approximately $5.7 million). The equipment, which operates at 350nm process technology, represents a critical step in Russia’s efforts to build an independent semiconductor manufacturing capability under Western sanctions, reports Cnews.
The lithography system was developed jointly with Belarusian company Planar under contracts from Russia’s Ministry of Industry and Trade, with development work completed in spring 2025. The machine can process 63 wafers of 150mm diameter or 43 wafers of 200mm diameter per hour. Delivery timeline stands at 18 months from advance payment, with customers required to pay 50% upfront.
Industry experts are divided on the pricing. Independent analyst Alexey Boyko called the price “very attractive,” noting it is significantly lower—by tens of percentage points—than comparable foreign equipment at 350nm. However, Alexander Timoshenko, head of Ternary Technologies, offered a more nuanced assessment, describing it as overpriced by global market standards but potentially justified as the cost of technological sovereignty under severe sanctions.
For comparison, a similar 130nm system from Dutch market leader ASML costs $15 million and processes 180 wafers per hour, while Nikon’s equivalent runs $12 million at 150 wafers per hour. ZNTC has announced plans to develop a next-generation 130nm lithography system priced at $6 million, which would process 100-140 wafers hourly—narrowing the gap with established international competitors.
ZNTC confirmed it has signed deferred delivery contracts but declined to disclose customer details. The company emphasized that its pricing remains competitive relative to foreign alternatives and reflects actual material, component, and labor costs. This development marks a significant milestone for Russia’s semiconductor industry as it seeks to reduce dependence on imports in a strategically critical technology sector.
